This inventor holds 2 USPTO granted patents and 2 published patent applications. Top assignee: Hynix Semiconductor Inc.. Active years: 2005.
Company Filing History:
Years Active: 2005
Title: Il Wook Kim: Innovator in Semiconductor Manufacturing
Introduction
Il Wook Kim is a prominent inventor based in Seoul, South Korea. He has made significant contributions to the field of semiconductor manufacturing, holding a total of 2 patents. His innovative methods aim to enhance the efficiency and effectiveness of semiconductor devices.
Latest Patents
Il Wook Kim's latest patents focus on methods of manufacturing semiconductor devices. One patent discloses a method that prevents increased contact resistance due to a native oxide film. This method involves preparing a semiconductor substrate with a lower structure that has a junction region. An interlayer dielectric film is formed over the entire surface of the substrate, followed by the creation of a contact hole that exposes the junction region. The process includes sequential dry-cleaning and wet-cleaning of the substrate surface, along with a preliminary treatment under a reducing gas atmosphere to remove the native oxide film. Additionally, impurity doping is performed in-situ to compensate for any damage on the contact surface. Another patent outlines a method that includes preparing a silicon substrate with a predetermined lower structure, forming an interlayer dielectric film, and creating a contact hole. The process ensures that ohmic contact characteristics are secured through nitrogen-hydrogen plasma processing, which removes remaining polymers without the need for additional apparatus.
Career Highlights
Il Wook Kim is currently employed at Hynix Semiconductor Inc., a leading company in the semiconductor industry. His work focuses on developing advanced manufacturing techniques that improve the performance and reliability of semiconductor devices.
Collaborations
Il Wook Kim collaborates with notable colleagues, including Seok Kiu Lee and Jun Hee Cho. Their combined expertise contributes to the innovative advancements in semiconductor technology.
Conclusion
Il Wook Kim's contributions to semiconductor manufacturing through his patents and collaborative efforts highlight his role as a key innovator in the field. His work continues to influence the development of more efficient semiconductor devices.