Ikuo Itakura is a prominent inventor based in Kitakyushu, Japan. He has made significant contributions to the field of electrostatic chuck technology, holding a total of 8 patents. His work has been instrumental in enhancing device yield and reducing arc discharge in semiconductor manufacturing processes.

Latest Patents

Ikuo Itakura's latest patents include innovative designs for electrostatic chucks. One notable patent describes an electrostatic chuck that features an electrically-conductive base plate with a gas inlet path for cooling gas introduction. This design includes a first electrostatic chuck part that clamps a wafer and a second part that clamps a focus ring, improving the overall efficiency of the device. Another patent focuses on an electrostatic chuck that reduces arc discharge, incorporating a ceramic dielectric substrate and a base plate with a gas introduction path. This design aims to enhance the reliability and performance of semiconductor devices.

Career Highlights

Ikuo Itakura has dedicated his career to advancing technology in the semiconductor industry. His work at Toto Ltd. has allowed him to collaborate with other talented professionals and contribute to groundbreaking innovations in electrostatic chuck design.

Collaborations

Some of Ikuo Itakura's notable coworkers include Jun Shiraishi and Yutaka Momiyama. Their collaborative efforts have further propelled advancements in the field of semiconductor manufacturing.

Conclusion

Ikuo Itakura's contributions to electrostatic chuck technology have significantly impacted the semiconductor industry. His innovative designs and collaborative spirit continue to inspire advancements in manufacturing processes.

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