Igor Ivanov

Title: Innovations of Igor Ivanov in Electrochemical Polishing

Introduction

Igor Ivanov is a notable inventor based in Pleasanton, California, recognized for his contributions to the field of semiconductor manufacturing. He holds a patent that focuses on electrochemical methods for polishing copper films on semiconductor substrates. His innovative approach addresses critical challenges in the semiconductor industry.

Latest Patents

Igor Ivanov's patent, titled "Electrochemical methods for polishing copper films on semiconductor substrates," introduces a method that utilizes an alkaline solution with a pH ranging from about 8.0 to 10.5. This method applies a constant current density of 5 to 100 amperes per square foot to an electrochemical cell, which consists of an electrode, the alkaline solution, and the copper film. The process allows for the removal of copper at a rate of 500 to 10,000 angstroms per minute. The endpoint of the electro-polishing is detected by a sudden change in applied voltage. Additionally, the alkaline polishing solution may contain copper ions, enabling selective copper deposition on the exposed copper surface when the current direction is reversed. This innovative method effectively compensates for dishing and erosion by re-depositing copper in areas where excessive material has been removed.

Career Highlights

Igor Ivanov is associated with Steag Cutek Systems, Inc., where he applies his expertise in electrochemical processes. His work has significantly impacted the efficiency and effectiveness of semiconductor manufacturing techniques.

Collaborations

Igor collaborates with talented coworkers, including Mei Zhu and Chiu H Ting, who contribute to the innovative environment at Steag Cutek Systems, Inc. Their combined efforts enhance the development of advanced technologies in the semiconductor field.

Conclusion

Igor Ivanov's contributions to electrochemical polishing methods represent a significant advancement in semiconductor technology. His innovative patent addresses critical industry needs and showcases his expertise in the field.