Igor Bagriy

Title: Igor Bagriy: Innovator in Non-Contact Workpiece Holding and Plasma Processing Technologies

Introduction

Igor Bagriy is a notable inventor based in Sunnyvale, California, recognized for his contributions to advanced manufacturing technologies. With a total of three patents to his name, Bagriy has made significant strides in the fields of non-contact workpiece holding and plasma processing methods.

Latest Patents

One of Bagriy's latest inventions is a non-contact workpiece holder designed for substantially planar workpieces. This innovative holder is particularly suited for handling thin workpieces without causing distortion. The invention features a cylindrical chuck with a gas inlet orifice positioned at an oblique angle. By introducing pressurized gas, a vortex and vacuum attraction are created, allowing a wafer to be held in close proximity to the chuck while preventing contact. This design minimizes distortion during processing, especially for very thin workpieces.

Another significant patent involves plasma processing methods and apparatus. In this invention, an article is rotated by a first drive around a first axis, while the first drive itself is rotated by a second drive. This dual rotation allows the article to enter the plasma at various angles, ensuring a more uniform processing time across different points on the article's surface. The direction of rotation can change during processing to enhance uniformity, allowing for optimized plasma interaction.

Career Highlights

Igor Bagriy is currently employed at Tru-Si Technologies, Inc., where he continues to develop innovative solutions in the field of manufacturing technology. His work has been instrumental in advancing techniques that improve efficiency and precision in industrial applications.

Collaborations

Bagriy collaborates with talented professionals in his field, including Oleg Siniaguine and Sergey Savastiouk. Their combined expertise contributes to the development of cutting-edge technologies that push the boundaries of current manufacturing practices.

Conclusion

Igor Bagriy stands out as a prominent inventor whose work in non-contact workpiece holding and plasma processing technologies has made a significant impact on the industry. His innovative patents reflect a commitment to enhancing manufacturing processes and improving product quality.