Company Filing History:
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Years Active: 2022-2023
Title: The Innovative Contributions of Hyunjune Cho
Introduction
Hyunjune Cho is a prominent inventor based in Suwon-si, South Korea. He has made significant contributions to the field of extreme ultraviolet (EUV) technology, holding two patents that showcase his innovative spirit and technical expertise.
Latest Patents
Hyunjune Cho's latest patents include an apparatus for generating extreme ultraviolet (EUV) light and an EUV mask inspection system. The apparatus for generating EUV light features a raw material supply unit that provides a plasma source for generating EUV light. This system utilizes a laser to create plasma from the plasma source, with a filter designed to extract EUV light. Additionally, a first protective layer is placed on the front surface of the filter, and a frame is constructed to expose a portion of the filter or the protective layer. The dimensions of the first region are carefully designed to be smaller than both the protective layer and the filter.
The EUV mask inspection system comprises a mask receiving unit for the manufactured EUV mask, a main chamber for conducting inspections, and a load-lock chamber situated between the mask receiving unit and the main chamber. This load-lock chamber includes a mask table for loading the EUV mask, a UV lamp for evaporating water molecules on the mask, and a cold trap to capture these evaporated molecules. The UV lamp irradiates the EUV mask with UV light, while the cold trap effectively traps the evaporated water molecules.
Career Highlights
Hyunjune Cho has worked with notable organizations such as Samsung Electronics and Sungkyunkwan University. His experience in these esteemed institutions has allowed him to refine his skills and contribute to groundbreaking advancements in EUV technology.
Collaborations
Throughout his career, Hyunjune Cho has collaborated with talented individuals, including Jihoon Na and Jaewhan Sung. These partnerships have fostered an environment of innovation and creativity, leading to the development of cutting-edge technologies.
Conclusion
Hyunjune Cho's contributions to the field of extreme ultraviolet technology are noteworthy and impactful. His patents reflect a deep understanding of the complexities involved in EUV systems, and his collaborations with esteemed colleagues further enhance his innovative legacy.