This inventor holds 2 USPTO granted patents. Top assignee: Lam Research Corporation. Active years: 2017-2019.
Company Filing History:
Years Active: 2017-2019
Title: Hyunjong Shim: Innovator in Semiconductor Technology
Introduction
Hyunjong Shim is a notable inventor based in San Ramon, CA (US). He has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase his innovative approach to solving complex engineering challenges.
Latest Patents
One of his latest patents is focused on a mask shrink layer for high aspect ratio dielectric etch. This invention relates to methods, apparatus, and systems for forming a recessed feature in a dielectric-containing stack on a semiconductor substrate. In many embodiments, a mask shrink layer is deposited on a patterned mask layer to narrow the openings in the mask layer. The mask shrink layer may be deposited through a vapor deposition process, including atomic layer deposition or chemical vapor deposition. This innovation results in narrower, more vertically uniform etched features. In some embodiments, etching is completed in a single etch step, while in others, the etching may be done in stages, cycled with a deposition step designed to deposit a protective sidewall coating on the partially etched features. Metal-containing films are particularly suitable as mask shrink films and protective sidewall coatings.
Career Highlights
Hyunjong Shim is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work focuses on advancing technologies that enhance the efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
Throughout his career, Hyunjong has collaborated with talented professionals, including Mark Henry Wilcoxson and Merrett Wong. These collaborations have contributed to the development of innovative solutions in the semiconductor field.
Conclusion
Hyunjong Shim's contributions to semiconductor technology through his patents and work at Lam Research Corporation highlight his role as an influential inventor in the industry. His innovative approaches continue to shape the future of semiconductor manufacturing.