This inventor holds 1 USPTO granted patent. Top assignee: Samsung Electronics Co., Ltd.. Active years: 2026.
Company Filing History:
Years Active: 2026
Title: Hyungwan Do - Innovator in Substrate Processing Technology
Introduction
Hyungwan Do is an inventor based in Suwon-si, South Korea. He has made significant contributions to the field of substrate processing technology. His innovative approach focuses on enhancing the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patent Applications
Hyungwan Do's notable patent application is titled "SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD USING THE SAME." This application describes a substrate processing system that includes a coating apparatus for applying a photoresist film on a semiconductor substrate. It also features an exposure apparatus that irradiates light onto the photoresist film to create a photoresist pattern region. The system further includes a developing system designed to remove unnecessary regions from the photoresist film, utilizing both wet and dry developing methods. Additionally, it incorporates a cleaning apparatus to eliminate edge beads from the photoresist film and a heating apparatus to ensure optimal processing conditions.
Conclusion
Hyungwan Do's work in substrate processing technology showcases his commitment to advancing semiconductor manufacturing. His innovative patent application reflects his expertise and potential impact in the industry.