Company Filing History:
Years Active: 2025
Title: Hyunchol Cho: Innovator in Titanium Silicon Nitride-Based Thin Films
Introduction
Hyunchol Cho is a prominent inventor based in Milpitas, CA (US). He has made significant contributions to the field of semiconductor technology, particularly in the development of titanium silicon nitride-based thin films. With a total of 4 patents to his name, Cho continues to push the boundaries of innovation in his field.
Latest Patents
One of Hyunchol Cho's latest patents focuses on "Conformal titanium silicon nitride-based thin films and methods of forming same." This technology relates to the formation of titanium nitride-based thin films, emphasizing the creation of conformal and smooth films. The method involves forming a diffusion barrier comprising TiSiN with a modulus exceeding 290 GPa and a silicon content exceeding 2.7 atomic percent. The process includes alternating deposition phases, where the semiconductor substrate is exposed to titanium and nitrogen precursors, followed by sequential exposure to titanium, silicon, and nitrogen precursors.
Career Highlights
Hyunchol Cho has established himself as a key figure in the semiconductor industry through his innovative work at Eugenus, Inc. His expertise in thin film technology has positioned him as a valuable asset in the research and development of advanced materials.
Collaborations
Throughout his career, Cho has collaborated with notable colleagues, including Hae Young Kim and Bunsen B Nie. These partnerships have fostered a collaborative environment that enhances the innovation process.
Conclusion
Hyunchol Cho's contributions to the field of titanium silicon nitride-based thin films exemplify his commitment to innovation and excellence. His work continues to influence the semiconductor industry, paving the way for future advancements.