Hsin Lan Pang

Title: Hsin Lan Pang: Innovator in Semiconductor Metrology

Introduction

Hsin Lan Pang is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor device fabrication, particularly in overlay metrology methods. His innovative approach has led to advancements in measurement accuracy during the manufacturing process of semiconductor devices.

Latest Patents

Hsin Lan Pang holds a patent for an "Overlay Measurement Target." This invention facilitates alignment and measurement of alignment errors between two layers on a semiconductor wafer structure or different exposures on the same layer. The target is designed to be small enough to fit within the active area of a semiconductor device, combined with appropriate measurement methods, resulting in improved measurement accuracy. He has 1 patent to his name.

Career Highlights

Throughout his career, Hsin Lan Pang has worked with prominent organizations such as Nanometrics Inc. and the Industrial Technology Research Institute. His work has been instrumental in enhancing the precision of semiconductor manufacturing processes.

Collaborations

Hsin Lan Pang has collaborated with notable colleagues, including Nigel Peter Smith and Yi-Sha Ku, who is a talented woman in the field. Their combined expertise has contributed to the success of various projects in semiconductor technology.

Conclusion

Hsin Lan Pang's contributions to semiconductor metrology exemplify the importance of innovation in technology. His work continues to influence the industry, paving the way for future advancements in semiconductor device fabrication.