This inventor holds 1 USPTO granted patent. Top assignee: Mikro Mesa Technology Co., Ltd.. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Hsiao-Fu Lu: Microdevice Manufacturing Inventor
Introduction
Hsiao-Fu Lu is an inventor based in Tainan City, Taiwan. His work includes a patented method for manufacturing microdevices, and he is associated with Mikro Mesa Technology Co., Ltd.
Latest Patents
Lu is credited with 1 patent, titled “Method of Manufacturing Micro Devices.” The method describes preparing a III-nitride epitaxial structure with p-type and n-type layers, an AlIII_othersN layer, and an undoped III-nitride layer. A patterned photoresist layer guides a first plasma etching process that forms a trench. A second plasma etching process then separates the structure into multiple microdevices and exposes the top surface of the etched AlIII_othersN layer.
Career Highlights
Lu’s patent focuses on plasma etching and the fabrication of microdevices from III-nitride epitaxial structures. The disclosed process uses sequential etching steps to shape and separate the devices.
Collaborations
Lu is associated with Mikro Mesa Technology Co., Ltd. The available information identifies this company connection but does not specify particular collaborators or joint projects.
Conclusion
Hsiao-Fu Lu’s patent documents a specialized approach to manufacturing microdevices through sequential plasma etching of a III-nitride structure.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile