Company Filing History:
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1 out of 832,912 Years Active: 1999-2000
Title: Hoseob Kim: Innovator in Electron Beam Technology
Introduction
Hoseob Kim is a notable inventor based in Milpitas, CA, who has made significant contributions to the field of electron beam technology. With a total of 2 patents to his name, Kim's work focuses on enhancing the precision and efficiency of semiconductor processing.
Latest Patents
One of Kim's latest patents involves detecting registration marks with a low energy electron beam for electron beam wafer or mask processing. In this innovative approach, a registration mark is capacitively coupled to the top surface of an overlying resist layer on a substrate, creating a voltage potential on the surface of the resist layer directly above the registration mark. The registration mark is connected to an electrical lead that produces an AC voltage, which is capacitively induced on the surface of the resist layer. Alternatively, the registration mark can be coupled to a conductive plate placed on the bottom surface of the semiconductor substrate. An AC voltage applied to this conductive plate induces a charge on the registration mark, which then capacitively induces a charge on the surface of the resist layer. As an electron beam scans across the surface of the resist layer, it generates secondary electrons that are influenced by the voltage potential created at the surface. By detecting the secondary electron signal generated by the electron beam, the voltage potential on the surface of the resist layer can be distinguished from surrounding areas. This method allows for the detection of registration marks using a low energy electron beam that does not penetrate the resist layer.
Career Highlights
Hoseob Kim has worked with Etec Systems, Inc., where he has applied his expertise in electron beam technology to advance semiconductor manufacturing processes. His innovative approaches have contributed to the development of more efficient and precise methods in the industry.
Collaborations
Kim has collaborated with Tai-Hon Philip Chang, further enhancing his work in the field of electron beam technology.
Conclusion
Hoseob Kim's contributions to electron beam technology and semiconductor processing demonstrate his innovative spirit and commitment to advancing the field. His patents reflect a deep understanding of the complexities involved in modern manufacturing techniques.