Company Filing History:
Years Active: 1996
Title: Hoi T Nguyen: Innovator in Electron Beam Inspection Technology
Introduction
Hoi T Nguyen is a notable inventor based in Milpitas, California. He has made significant contributions to the field of particle scanning systems and automatic inspection technologies. His innovative work has led to the development of a unique electron beam inspection system.
Latest Patents
Hoi T Nguyen holds a patent for an "Electron beam inspection system and method." This invention encompasses various embodiments of a method and apparatus designed for a particle scanning system. The system directs a particle beam at the surface of a substrate for scanning purposes. It includes a selection of detectors that can detect secondary particles, back-scattered particles, and transmitted particles from the substrate. The substrate is mounted on an x-y stage, allowing it to have at least one degree of freedom during scanning. Additionally, the substrate is subjected to an electric field to accelerate secondary particles. The system is equipped with capabilities to accurately measure the substrate's position concerning the charged particle beam. An optical alignment means is also included for initial alignment beneath the particle beam. Furthermore, a vacuum means is utilized for evacuating and repressurizing the chamber containing the substrate, enhancing the efficiency of the inspection process.
Career Highlights
Hoi T Nguyen is currently associated with Kla Instruments Corporation, where he continues to innovate in the field of electron beam inspection technologies. His work has been instrumental in advancing the capabilities of particle scanning systems.
Collaborations
Hoi T Nguyen has collaborated with notable colleagues, including Dan Meisburger and Alan D Brodie. Their combined expertise has contributed to the success of various projects within the company.
Conclusion
Hoi T Nguyen's contributions to electron beam inspection technology highlight his role as a significant inventor in the field. His innovative patent and ongoing work at Kla Instruments Corporation demonstrate his commitment to advancing inspection systems.