Hoang Huy Vu

Title: Hoang Huy Vu: Innovator in Substrate Transport Systems

Introduction

Hoang Huy Vu is a notable inventor based in San Jose, California. He has made significant contributions to the field of substrate transport systems, holding a total of four patents. His innovative designs focus on improving the efficiency and precision of substrate handling in various applications.

Latest Patents

One of his latest patents is the "Multi-piece substrate holder and alignment mechanism." This system is designed for transporting substrates while ensuring precise horizontal and vertical alignment. The innovative design decouples the functions of transporting and aligning substrates, featuring a carriage with multiple chuck assemblies. Each chuck assembly includes vertical alignment wheels for precise vertical placement, while a pedestal slides freely on the base, equipped with horizontal alignment wheels for accurate horizontal positioning. An electrostatic chuck is magnetically held to the pedestal, enhancing the system's functionality.

Another significant patent is the "Linear vacuum robot with Z motion and articulated arm." This invention describes an apparatus and methods for efficiently transporting and processing substrates, including wafers. The system aims to improve throughput at reasonable costs compared to existing systems. It features a linear transport chamber with tracks and robot arms that transfer substrates along processing chambers. The four-axis robot arm is capable of linear translation, rotation, articulation, and Z-motion, making it a versatile tool in substrate handling.

Career Highlights

Throughout his career, Hoang Huy Vu has worked with prominent companies such as Brooks Automation GmbH and Intevac, Inc. His experience in these organizations has contributed to his expertise in substrate transport systems and automation technologies.

Collaborations

Some of his notable coworkers include Terry Bluck and Gee Sun Hoey. Their collaboration has likely fostered innovative ideas and advancements in the field.

Conclusion

Hoang Huy Vu is a distinguished inventor whose work in substrate transport systems has led to significant advancements in the industry. His patents reflect a commitment to innovation and efficiency, making him a valuable contributor to the field of technology.