Company Filing History:
Years Active: 1978-1993
Title: Hitoshi Ebata: Innovator in Semiconductor Vapor Phase Growth
Introduction: Hitoshi Ebata, an accomplished inventor based in Mishima, Japan, has made significant contributions to the field of semiconductor technology. With a portfolio of 8 patents, his innovations focus on improving processes and systems in semiconductor manufacturing, particularly through vapor phase growth techniques.
Latest Patents: Among his latest patents is a "Process Control System of Semiconductor Vapor Phase Growth Apparatus." This invention enhances the control over the thickness and resistivity of semiconductors grown on substrates using a vapor phase growth method. The system operates through a programmed sequence that adjusts parameters to achieve target specifications for each batch. Additionally, it includes an innovative feature where an auxiliary mass flow valve acts as a backup for faulty main valves, ensuring uninterrupted operation.
Another notable patent is for a "Semiconductor Vapor Phase Growing Apparatus." In this invention, the temperature of a semiconductor wafer is meticulously controlled within a reaction furnace. The control unit adjusts the heating output and gas flow by executing a sequence of operations that includes detecting wafer temperature and adapting the heating process according to a predetermined profile. This system uses a memory that stores program instructions for executing controlled temperature gradients, thereby optimizing the chemical reactions responsible for semiconductor formation.
Career Highlights: Hitoshi Ebata is currently associated with Toshiba Kikai Kabushiki Kaisha, a leading company in the technology and manufacturing sector. His role in developing cutting-edge semiconductor technologies underscores the importance of innovation in this highly competitive field.
Collaborations: Ebata has worked alongside prominent coworkers such as Takao Manabe and Yoshizo Komiyama. Their collaborations have fostered an environment of innovation, where ideas can merge to result in groundbreaking advancements in semiconductor technology.
Conclusion: Hitoshi Ebata's contributions to the semiconductor industry showcase the vital role of inventors in driving technological progress. With his innovative patents and collaborative efforts at Toshiba, he continues to shape the future of semiconductor manufacturing, laying the groundwork for advancements that will benefit both industry and consumers alike.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.