Hisayuki Miyata

Title: Hisayuki Miyata: Innovator in Ceramic Electrostatic Technology

Introduction

Hisayuki Miyata is a prominent inventor based in Ibo-gun, Japan. He is known for his significant contributions to the field of electrostatic technology, particularly in the development of ceramic electrostatic chucks.

Latest Patents

Miyata holds 1 patent for his invention titled "Ceramic electrostatic chuck and method." This innovative electrostatic chuck is designed to clamp working members, such as semiconductor wafers, securely to the chuck. The design includes at least one conductive electrode and an insulating layer that separates the electrode from the working member. The insulating layer is composed of a composition containing pyrolytic boron nitride (PBN) and a carbon dopant, ensuring its electrical resistivity is less than 10¹⁴ Ω-cm. By applying a voltage across the conductive electrode, an electrostatic field is generated, effectively clamping the working member to the chuck.

Career Highlights

Miyata is associated with Advanced Ceramics Corporation, where he has been instrumental in advancing ceramic technologies. His work has significantly impacted the semiconductor manufacturing industry, enhancing the efficiency and reliability of electrostatic chucks.

Collaborations

Miyata has collaborated with notable colleagues, including Junich Honma and Kotaro Mino. Their combined expertise has contributed to the development of innovative solutions in the field of ceramics and electrostatics.

Conclusion

Hisayuki Miyata's contributions to ceramic electrostatic technology exemplify the importance of innovation in the semiconductor industry. His patented inventions continue to influence the design and functionality of electrostatic chucks, showcasing his role as a key inventor in this specialized field.