Company Filing History:
Years Active: 1997-2020
Title: Hiroshi Inami: Innovator in Ion Beam Technology
Introduction
Hiroshi Inami is a prominent inventor based in Kyoto, Japan. He has made significant contributions to the field of ion beam technology, holding a total of 2 patents. His work focuses on innovative devices and methods that enhance the efficiency and effectiveness of ion beam irradiation.
Latest Patents
Inami's latest patents include an ion beam irradiation device and an ion beam irradiation method. The ion beam irradiation device features a substrate holder that securely holds a substrate, a rotating mechanism that allows the substrate holder to rotate, and a reciprocating mechanism that moves the substrate holder in a specific direction. This device is equipped with an ion beam irradiator that directs an ion beam onto the substrate. The ion beam is designed with a center region that maintains a predetermined beam current density, while the peripheral region has a lower density. The size of the center region is larger than the substrate size in the direction orthogonal to the moving direction.
His second patent, the substrate holding device, includes a base that is cooled with a heat-absorbing fluid. A flexible sheet is extended over the base to form a sealed portion filled with the heat-absorbing fluid. Additionally, a rubber elastic material is placed on the sheet, and a substrate retainer presses the edges of the substrate against the base. This innovative design may also incorporate metal elastic members for enhanced performance.
Career Highlights
Hiroshi Inami has been associated with Nissin Electric Co., Ltd., where he has contributed to various projects and innovations in ion beam technology. His expertise in this field has positioned him as a key figure in advancing the capabilities of ion beam applications.
Collaborations
Inami has collaborated with notable colleagues, including Koichi Orihira and Yasunori Ando. Their combined efforts have led to advancements in the technology and applications of ion beam devices.
Conclusion
Hiroshi Inami's contributions to ion beam technology through his patents and work at Nissin Electric Co., Ltd. highlight his role as an influential inventor. His innovative designs continue to shape the future of ion beam applications in various industries.