Hironori Mizoguchi

Title: Innovations of Hironori Mizoguchi: Pioneering Advances in Exposure Apparatus Technology

Introduction

Hironori Mizoguchi, an accomplished inventor based in Koshi, Japan, has made significant contributions to the field of exposure apparatus technology with a notable record of two patents. His innovations focus on enhancing the efficiency and precision of resist pattern formation, which is crucial in semiconductor manufacturing.

Latest Patents

Mizoguchi's latest patents showcase cutting-edge techniques designed to improve the resolution and uniformity of resist patterns on wafers. One such patent entails a resist pattern forming method that effectively utilizes a flood exposure apparatus to adjust exposure amounts according to the in-plane distribution of line widths previously gathered from inspection data. The methods he developed for adjusting exposure include both moving strip-shaped irradiation areas and intermittent movements corresponding to shot areas from prior exposures.

In addition, he patented a sophisticated light irradiation apparatus that features a rotary holding unit capable of rotating substrates while being illuminated by a lighting unit. This design incorporates a light shielding mask with an opening portion that widens away from the rotary axis, allowing for precise light irradiation while adjusting positioning as needed.

Career Highlights

Mizoguchi's career is marked by his role at Tokyo Electron Limited, a leader in the semiconductor industry known for innovation. His work primarily revolves around developing advanced exposure technologies that are pivotal for the next generation of semiconductors and photolithography processes.

Collaborations

During his career, Mizoguchi has collaborated with esteemed coworkers such as Gousuke Shiraishi and Masaru Tomono. These collaborations have fostered an environment of creativity and technological advancement within the company, further driving innovations that enhance the precision of semiconductor fabrication.

Conclusion

Hironori Mizoguchi's inventive spirit and dedication to refining exposure technologies have made a significant impact in the field of semiconductor manufacturing. With his continued work at Tokyo Electron Limited, his contributions are likely to shape the future of the industry, promoting advancements that enhance performance and reliability in semiconductor devices.