Kawasaki, Japan

Hiromitsu Kanbara


Average Co-Inventor Count = 4.9

ph-index = 3

Forward Citations = 127(Granted Patents)


Company Filing History:


Years Active: 1996-2003

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3 patents (USPTO):Explore Patents

Title: Hiromitsu Kanbara: Innovator in Vacuum Treatment Technologies

Introduction: Hiromitsu Kanbara is a prominent inventor based in Kawasaki, Japan, renowned for his contributions to the field of vacuum treatment technologies. With a total of three patents to his name, Kanbara has demonstrated significant expertise and innovation in developing methods that enhance semiconductor processing.

Latest Patents: Kanbara's latest patents include a groundbreaking "Method and apparatus for vacuum treatment" and an innovative "Dry etching method." The first patent outlines a vacuum treatment system that utilizes a sensor wafer to detect and process data regarding the vacuum treatment state of a standard wafer. By integrating a controller that relies on processed data, the system effectively manages the treatment of wafers under vacuum conditions, optimizing performance.

His second patent, the dry etching method, introduces a process where an object is etched in a low-pressure vapor phase processing chamber. By feeding an etching gas enriched with a small amount of additive gas containing oxygen, Kanbara's method significantly minimizes unwanted reactions between the reaction gas and the chamber walls, leading to improved etching outcomes.

Career Highlights: Throughout his career, Hiromitsu Kanbara has worked with leading companies such as Tokyo Electron Limited and Kabushiki Kaisha Toshiba. His time in these organizations has not only honed his technical skills but also positioned him as a key player in advancing vacuum treatment technology.

Collaborations: Kanbara has had meaningful collaborations with notable colleagues, including Makoto Hasegawa and Hiromi Sakima. Their combined expertise has fostered an environment of innovation and creativity, leading to successful developments in their respective fields.

Conclusion: Hiromitsu Kanbara is a significant figure in the realm of inventors, particularly in developing technologies that enhance vacuum treatment processes. His innovative patents reflect a dedication to advancing semiconductor processing methods, making him a valuable contributor to the industry. As technology advances, Kanbara's work will continue to influence future innovations in vacuum treatment and semiconductor manufacturing.

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