Hiromasa Shibata

Title: Hiromasa Shibata: Innovator in Optical Technology

Introduction

Hiromasa Shibata is a prominent inventor based in Yokohama, Japan. He has made significant contributions to the field of optical technology, holding a total of 4 patents. His work focuses on advanced inspection techniques and microscopy, which are crucial for various applications in the industry.

Latest Patents

One of Shibata's latest patents is for a polarized light defect detection system in pupil images. This defect inspecting apparatus is designed to inspect defects on a sample with a patterned surface. It features a stage that moves and turns, a light source, and an illuminating optical system that uses a polarizer and an objective lens to epi-illuminate the sample surface. The detecting optical system captures a pupil image by analyzing the reflection light from the sample, allowing for quick judgment of the pattern conformity on the substrate.

Another notable invention is the liquid immersion microscope. This device enables nondestructive observation of a substrate using ultrapure water as a liquid for observation. The microscope includes a supporting unit for the substrate, a liquid immersion objective lens, and a system for supplying and draining the observation liquid. This innovation ensures that the quality of the substrate is not compromised during the observation process.

Career Highlights

Hiromasa Shibata is currently employed at Nikon Corporation, a leading company in imaging and optical products. His work at Nikon has allowed him to develop cutting-edge technologies that enhance the capabilities of optical inspection and microscopy.

Collaborations

Shibata has collaborated with notable colleagues, including Manabu Komatsu and Toshio Uchikawa. Their combined expertise has contributed to the advancement of optical technologies and innovations in the field.

Conclusion

Hiromasa Shibata is a distinguished inventor whose work in optical technology has led to significant advancements in defect detection and microscopy. His contributions continue to impact the industry positively, showcasing the importance of innovation in technology.