Hirofumi Katsumata

Title: Hirofumi Katsumata: A Pioneer in Semiconductor Temperature Control Technologies

Introduction

Hirofumi Katsumata is an accomplished inventor hailing from Fuji, Japan. With a strong focus on innovations in semiconductor technology, he holds two notable patents that address critical challenges in temperature control for semiconductor substrates. His work has significantly impacted how temperatures are managed in high-precision semiconductor manufacturing processes.

Latest Patents

Katsumata's latest patents showcase his expertise in controlling the rise and fall of temperature in semiconductor substrates. The first patent, titled "Method and apparatus for controlling rise and fall of temperature in semiconductor substrates," introduces a method that prevents cracks in semiconductors with differing temperature characteristics during oxidation, diffusion, or chemical vapor deposition processes. This invention employs measured temperatures at various points on the substrate, facilitating an adaptable temperature control program selection to enhance the process's effectiveness. Additionally, the design includes a specialized susceptor that minimizes contamination from metal impurities during thin film formation.

His second patent, "Wafer heating device and method of controlling the same," outlines a wafer heating device that improves temperature distribution uniformity across the wafer surface. The device consists of a uniquely designed annular susceptor supporting the wafer, with both disc-shaped and annular heaters working with independent closed-loop controls. This arrangement allows for precise temperature control of the wafer, ensuring optimal heating characteristics during processing.

Career Highlights

Throughout his career, Hirofumi Katsumata has demonstrated commitment and innovation in his field. His patents not only improve semiconductor manufacturing processes but also showcase his dedication to advancing technology. His expertise has made him a valuable contributor to the semiconductor industry, where his inventions are recognized for their practical applications.

Collaborations

Katsumata has collaborated with notable colleagues such as Hideki Ito and Hidenori Takahashi. Their collective efforts exemplify the power of teamwork in driving innovations in complex fields such as semiconductor technology. Together, they continue to push the boundaries of what is possible in temperature management within semiconductor manufacturing.

Conclusion

Hirofumi Katsumata has made significant contributions to the field of semiconductor technology through his innovative patents and collaborative efforts. His work not only addresses existing challenges but also paves the way for future advancements in the industry. As semiconductor technology continues to evolve, Katsumata's inventions will undoubtedly play a crucial role in shaping its future.