Location History:
- Tokyo, JP (2008 - 2010)
- Yamagata, JP (2010)
- Imari, JP (2007 - 2011)
Company Filing History:
Years Active: 2007-2011
Title: The Innovations of Hidehiko Okuda
Introduction
Hidehiko Okuda is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor technology, particularly in the development of silicon wafers. With a total of 9 patents to his name, Okuda's work has had a substantial impact on the industry.
Latest Patents
Okuda's latest patents include a p-type silicon wafer and a method for heat-treating the same. This p-type silicon wafer was subjected to heat treatment to achieve a resistivity of 10 Ω·cm or more, a BMD density of 5×10 defects/cm or more, and an n-type impurity concentration of 1×10 atoms/cm or less at a depth of within 5 μm from the surface of the wafer. The method for heat-treating p-type silicon wafers involves several steps, including loading the wafers onto a wafer boat, inserting them into a vertical furnace, and holding them in an argon gas ambient atmosphere at a temperature of 1100 to 1300 °C for one hour. Afterward, the wafer boat is moved to a transfer chamber for discharging the silicon wafers, and the next set of wafers is transferred to the wafer boat within a waiting time of less than two hours.
Another notable patent is the method of manufacturing a bonded wafer. This method includes an oxidation step where an oxide film is formed on at least one surface of a base wafer, followed by a bonding step where the base wafer is bonded to a top wafer to create a bonded wafer. The oxidation step involves heating the base wafer to a temperature ranging from 800 to 1300 °C at a rate of temperature increase from 1 to 300 °C/second in an oxidizing atmosphere.
Career Highlights
Hidehiko Okuda is currently associated with Sumco Corporation, a leading company in the semiconductor industry. His work has been instrumental in advancing the technology related to silicon wafers, which are critical components in electronic devices.
Collaborations
Okuda has collaborated with notable coworkers, including Tatsumi Kusaba and Akihiko Endo. Their combined expertise has contributed to the successful development of innovative technologies in the semiconductor field.
Conclusion
Hidehiko Okuda's contributions to semiconductor technology through
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