Company Filing History:
Years Active: 2019-2020
Title: Heyin Li: Innovator in Semiconductor Metrology
Introduction
Heyin Li is a prominent inventor based in Shanghai, China. He has made significant contributions to the field of semiconductor metrology, holding a total of 3 patents. His work focuses on optimizing measurement systems to enhance precision and accuracy in semiconductor applications.
Latest Patents
Heyin Li's latest patents include innovative methods and systems for measurement library optimization in semiconductor metrology. This patent presents techniques for optimizing a set of measurement library control parameters tailored for specific metrology applications. The process involves collecting measurement signals from various metrology targets and resolving user-selected parameters by fitting a pre-computed measurement library function to these signals. The optimization of library control parameters is achieved without recalculating the pre-computed library, leading to improved measurement performance.
Another notable patent is related to automated metrology system selection. This invention evaluates and ranks the measurement efficacy of different measurement system combinations and recipes for specific applications. By quantifying measurement efficacy through performance metrics, the system allows users to select the most effective measurement system combination in an objective and quantitative manner. This innovation significantly reduces measurement time and enhances overall measurement results.
Career Highlights
Heyin Li is currently employed at Kla Tencor Corporation, a leading company in the semiconductor industry. His work at the company has been instrumental in advancing metrology techniques and improving measurement systems.
Collaborations
Some of his notable coworkers include Meng Cao and Lie-Quan Lee, who have collaborated with him on various projects within the semiconductor metrology field.
Conclusion
Heyin Li's contributions to semiconductor metrology through his innovative patents and work at Kla Tencor Corporation highlight his role as a key figure in advancing measurement technologies. His efforts continue to shape the future of precision measurement in the semiconductor industry.