Company Filing History:
1 out of 832,812 Years Active: 2002
Title: Herbert Mittermaier: Innovator in Susceptor Loading Technology
Introduction
Herbert Mittermaier is a notable inventor based in Rattenkirchen, Germany. He has made significant contributions to the field of deposition reactors, particularly through his innovative methods for loading susceptors.
Latest Patents
Mittermaier holds a patent for a "Method and device for loading a susceptor." This invention provides a method for loading a heated susceptor or a susceptor segment of a deposition reactor with a substrate wafer resting on a holding means. The process involves reaching a holding position where the substrate wafer and the susceptor are at a spaced vertical distance from one another before making contact. This innovative approach ensures that the substrate wafer is only brought into contact with the susceptor after a designated residence time in the holding position.
Career Highlights
Throughout his career, Herbert Mittermaier has focused on enhancing the efficiency and effectiveness of deposition processes. His work has contributed to advancements in semiconductor manufacturing and other related fields.
Collaborations
Mittermaier has collaborated with notable colleagues, including Georg Brenninger and Alois Aigner. These partnerships have fostered innovation and development in their respective areas of expertise.
Conclusion
Herbert Mittermaier's contributions to the field of susceptor loading technology exemplify his commitment to innovation. His patent and collaborative efforts highlight the importance of advancements in deposition reactor technology.