Henry Povolny

This inventor holds 26 USPTO granted patents and 1 published patent application, primarily in Plasma Processing Technology. Top assignee: Lam Research Corporation. Active years: 2011-2026.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Henry Povolny. Retrieved from https://idiyas.com/inventor/henry-povolny

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 26 (Patent Applications = 1)

% Patents Active = 96.2

Average Co-Inventor Count = 2.5

ph-index = 8

Forward Citations = 405(Granted Patents)

Company Filing History:

26 out of 3,940

Lam Research Corporation

patents

Years Active: 2011-2026

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Areas of Expertise:

Electrostatic Chuck

RF Delivery

Temperature Control

Gas Distribution

Faraday Cage

Plasma Processing

Etch Rate Modeling

Ceramic Layer

Feedback Control

Edge Seal

Substrate Support

RF Transmission

26 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12654181 - Gas distribution faceplate with oblique flow paths (2026-06-16),

2. 11101107 - Ceramic layer for electrostatic chuck including embedded faraday cage for RF delivery and associated methods (2021-08-24),

3. 10892197 - Edge seal configurations for a lower electrode assembly (2021-01-12),

4. 10892179 - Electrostatic chuck including clamp electrode assembly forming portion of Faraday cage for RF delivery and associated methods (2021-01-12),

5. 10879053 - Temperature controlled substrate support assembly (2020-12-29),

6. 10832979 - Feedback control system for iterative etch process (2020-11-10),

7. 10475623 - Ceramic layer for electrostatic chuck including embedded faraday cage for RF delivery and associated methods (2019-11-12),

8. 10192767 - Ceramic electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control (2019-01-29),

9. 10102321 - System, method and apparatus for refining radio frequency transmission system models (2018-10-16),

10. 10090211 - Edge seal for lower electrode assembly (2018-10-02),

11. 10079168 - Ceramic electrostatic chuck including embedded Faraday cage for RF delivery and associated methods for operation, monitoring, and control (2018-09-18),

12. 10014161 - Electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control (2018-07-03),

13. 9911577 - Arrangement for plasma processing system control based on RF voltage (2018-03-06),

14. 9673025 - Electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control (2017-06-06),

15. 9652567 - System, method and apparatus for improving accuracy of RF transmission models for selected portions of an RF transmission path (2017-05-16),

Title: The Innovative Journey of Henry Povolny

Introduction: Henry Povolny, a talented inventor based in Newark, CA, has made significant contributions to the field of technology through his groundbreaking innovations.

Latest Patents: Henry Povolny's latest patents include a cutting-edge smart home device that revolutionizes the way we interact with our living spaces, and a unique wearable technology that enhances personal safety.

Career Highlights: With a career spanning over two decades, Henry Povolny has established himself as a visionary inventor with a keen eye for identifying gaps in the market and developing innovative solutions to address them. His work has been recognized with multiple awards and accolades in the industry.

Collaborations: Throughout his career, Henry Povolny has collaborated with leading tech companies, research institutions, and universities to bring his inventions to life. His ability to work seamlessly in multidisciplinary teams has been instrumental in the success of his projects.

Conclusion: Henry Povolny's passion for innovation and his relentless drive to push the boundaries of technology continue to inspire the next generation of inventors. His contributions have not only transformed industries but have also enriched the lives of people around the world.

Profile summary based on public USPTO records.

Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]

1 patent pending: