This inventor holds 2 USPTO granted patents. Top assignee: Kla Instruments Corporation. Active years: 1996.
Company Filing History:
Years Active: 1996
Title: Innovations of Henry Pearce-Percy
Introduction
Henry Pearce-Percy is a notable inventor based in Los Gatos, California. He has made significant contributions to the field of charged particle scanning systems, particularly in the area of electron beam inspection. With a total of 2 patents to his name, Pearce-Percy continues to push the boundaries of technology.
Latest Patents
His latest patents include an "Electron beam inspection system and method." This invention describes a method and apparatus for a charged particle scanning system and an automatic inspection system, which includes wafers and masks used in microcircuit fabrication. The system directs a charged particle beam at the surface of a substrate for scanning purposes. It incorporates a selection of detectors to detect secondary charged particles, back-scattered charged particles, and transmitted charged particles from the substrate. The substrate is mounted on an x-y stage, providing at least one degree of freedom during scanning. Additionally, the substrate is subjected to an electric field on its surface to accelerate the secondary charged particles. The system is designed to facilitate inspection at low beam energies on charge-sensitive insulating substrates and accurately measure the substrate's position concerning the charged particle beam. An optical alignment system is also included for initial alignment beneath the charged particle beam. Furthermore, a vacuum system is employed for evacuating and repressurizing the chamber containing the substrate, allowing for efficient handling of multiple substrates during inspection.
Career Highlights
Henry Pearce-Percy is associated with Kla Instruments Corporation, where he has been instrumental in developing advanced inspection technologies. His work has significantly impacted the microcircuit fabrication industry, enhancing the precision and efficiency of inspection processes.
Collaborations
Throughout his career, Pearce-Percy has collaborated with notable colleagues, including Alan D Brodie and Anil A Desai. These collaborations have contributed to the advancement of technologies in the field of electron beam inspection.
Conclusion
Henry Pearce-Percy is a distinguished inventor whose work in electron beam inspection systems has paved the way for innovations in microcircuit fabrication. His contributions continue to influence the industry, showcasing the importance of advancements in technology.