Company Filing History:
Years Active: 1998-1999
Title: Innovations of Henry K Chau
Introduction
Henry K Chau is a notable inventor based in San Francisco, CA. He holds a total of 4 patents that contribute significantly to the field of semiconductor technology. His work focuses on methods and apparatuses that enhance the detection and analysis of thin films and macro defects in various substrates.
Latest Patents
One of his latest patents is a "Thin film detection method and apparatus." This invention provides a method for detecting the presence of a thin film, such as a photoresist film, on a semiconductor wafer or other substrates. The method utilizes the sinusoidal variation in the reflected optical power when light is incident on the wafer surface, allowing for the determination of whether an undeveloped photoresist layer is present. This capability is particularly valuable when visual inspection is insufficient, especially in the presence of underlying patterns. Additionally, this method can be used to determine the thickness of a particular thin film.
Another significant patent is the "Method and apparatus for macro defect detection using scattered light." This invention addresses the detection of macro defects in processed or partly processed semiconductor wafers, liquid crystal display elements, and disk drive elements. By employing automated image processing techniques, the method forms a reference image and a sample image from scattered light, which are then compared to identify defects. The use of techniques such as thresholding and blob analysis enhances the accuracy of defect detection.
Career Highlights
Henry K Chau has worked with prominent companies in the technology sector, including Nikon Corporation and Nikon Research Corporation of America. His experience in these organizations has allowed him to develop and refine his innovative ideas in semiconductor technology.
Collaborations
Throughout his career, Henry has collaborated with talented individuals such as Arun Ananth Aiyer and John H McCoy. These collaborations have contributed to the advancement of his inventions and the overall progress in the field.
Conclusion
Henry K Chau's contributions to semiconductor technology through his patents and collaborations highlight his innovative spirit and dedication to advancing the industry. His work continues to influence the methods used in detecting thin films and macro defects, showcasing the importance of innovation in technology.