Company Filing History:
Years Active: 2001-2004
Title: Innovations by Inventor Henry Fong
Introduction
Henry Fong is a notable inventor based in Daly City, California. He has made significant contributions to the field of semiconductor technology, holding a total of four patents. His work focuses on improving processes within plasma chambers, which are essential in semiconductor manufacturing.
Latest Patents
One of Henry Fong's latest patents is a "Shield or ring surrounding semiconductor workpiece in plasma chamber." This invention features a ring or collar that surrounds a semiconductor workpiece, designed to enhance the efficiency of plasma processes. The elevated collar portion of the ring is oriented at an obtuse angle, specifically 135 degrees, which helps to scatter ions in a direction more parallel to the workpiece. This design reduces erosion of the dielectric shield and improves spatial uniformity in the plasma process. Another significant patent is a "Substrate cleaning process," which involves exposing a substrate to energized process gas to effectively remove residue and resist material. This method utilizes a cleaning gas, such as an oxygen-containing gas, along with an additive gas to ensure thorough cleaning.
Career Highlights
Henry Fong is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His innovative work has contributed to advancements in semiconductor manufacturing processes, making him a valuable asset to his organization.
Collaborations
Henry has collaborated with notable coworkers, including Bryan Y Pu and Hongqing Shan, who have also contributed to advancements in semiconductor technology.
Conclusion
Henry Fong's contributions to semiconductor technology through his patents and work at Applied Materials, Inc. highlight his role as an influential inventor in the field. His innovative approaches continue to shape the future of semiconductor manufacturing processes.