Company Filing History:
Years Active: 2022-2023
Title: Henri Tuomas Antero Jussila: Innovator in Semiconductor Technology
Introduction
Henri Tuomas Antero Jussila is a notable inventor based in Espoo, Finland, recognized for his contributions to semiconductor technology. With a total of two patents to his name, Jussila's innovative work in the area of molybdenum metal film deposition has helped advance electronic materials and devices.
Latest Patents
Jussila's latest patents focus on methods for depositing a molybdenum metal film over a dielectric surface of a substrate using a cyclical deposition process. The patents disclose a step-by-step methodology which includes providing a substrate with a dielectric surface in a reaction chamber, depositing a nucleation film directly on that surface, and subsequently depositing a molybdenum metal film on the nucleation film. The process involves contacting the substrate with a first vapor phase reactant comprising a molybdenum halide precursor, followed by contacting it with a second vapor phase reactant that includes a reducing agent precursor. These methods contribute significantly to the development of semiconductor device structures, incorporating molybdenum metal films positioned over dielectric materials with an intermediate nucleation layer.
Career Highlights
Jussila is employed at ASM IP Holding B.V., a company specializing in the development of innovative semiconductor manufacturing equipment. His role in this organization has allowed him to expand his expertise and contribute significantly to the field of material science, particularly in the processes aimed at enhancing the efficiency of semiconductor fabrication.
Collaborations
Throughout his career, Jussila has worked alongside skilled professionals like Bhushan Zope and Kiran Shrestha. These collaborations have fostered a rich environment for innovation, enabling the sharing of ideas and the progression of cutting-edge research in semiconductor technology.
Conclusion
Henri Tuomas Antero Jussila's contributions to the field of semiconductor technology, especially through his innovative methods for molybdenum film deposition, showcase his significant role as an inventor. His work not only advances the capabilities of semiconductor devices but also exemplifies the importance of collaboration and innovation in the tech industry.