Fremont, CA, United States of America

Heng Hao


Average Co-Inventor Count = 3.2

ph-index = 1

Forward Citations = 3(Granted Patents)


Company Filing History:


Years Active: 2019-2024

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5 patents (USPTO):Explore Patents

Title: The Innovations of Heng Hao

Introduction

Heng Hao is a notable inventor based in Fremont, CA, who has made significant contributions to the field of semiconductor and display process equipment tools. With a total of 5 patents to his name, he has demonstrated a strong commitment to advancing technology and improving manufacturing processes.

Latest Patents

One of Heng Hao's latest patents is titled "Deep auto-encoder for equipment health monitoring and fault detection in semiconductor and display process equipment tools." This invention relates to a method for detecting anomalies in time-series traces received from sensors of manufacturing tools. The process involves a server that feeds a set of training time-series traces to a neural network, which is configured to derive a model that minimizes reconstruction error. The server extracts input time-series traces from sensors associated with manufacturing tools that produce silicon substrates. By feeding these traces to the trained neural network, the server generates output time-series traces based on the model. It then calculates the mean square error between the input and output traces, declaring a sensor as having an anomaly when the error exceeds a predetermined value.

Career Highlights

Heng Hao is currently employed at Applied Materials, Inc., where he continues to innovate and contribute to the field. His work focuses on enhancing the reliability and efficiency of manufacturing processes through advanced monitoring techniques.

Collaborations

Heng has collaborated with talented coworkers such as Sreekar Bhaviripudi and Shreekant Gayaka, further enriching his work environment and fostering innovation.

Conclusion

Heng Hao's contributions to the field of semiconductor technology and his innovative patents highlight his role as a key inventor in the industry. His work not only advances technology but also sets a standard for future innovations in equipment health monitoring.

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