Company Filing History:
Years Active: 1996-1998
Title: Hatice Sahin: Innovator in Wafer Positioning Technology
Introduction
Hatice Sahin is a prominent inventor based in Cupertino, CA, known for her contributions to the field of semiconductor technology. With a focus on improving wafer processing systems, she has made significant strides in enhancing the precision and efficiency of wafer handling.
Latest Patents
Hatice Sahin holds 2 patents, with her latest invention being a wafer positioning system. This innovative system determines the position of a wafer during processing by monitoring the position of the wafer transport robot. It utilizes one or more position sensors to track the wafer's location as it is transported. The system features a transparent cover on the surface of the wafer handling chamber and two optical position sensors positioned on this cover. These sensors direct light through the chamber to reflectors near the floor, which reflect the light back to the sensors. A detector within the position sensor identifies when the beam path to the reflector is uninterrupted. As wafers are moved through the chamber, the edge of the wafer interrupts the beam path, causing the sensor output to switch states. This allows for precise measurement of the wafer transport robot's position. If the wafer is misaligned, the robot's position is adjusted accordingly to ensure optimal processing.
Career Highlights
Hatice Sahin is currently employed at Applied Materials, Inc., where she continues to develop cutting-edge technologies in the semiconductor industry. Her work has significantly impacted the efficiency of wafer processing, making her a valuable asset to her company.
Collaborations
Throughout her career, Hatice has collaborated with notable colleagues, including Lloyd M Berken and Frederik W Freerks. These partnerships have fostered innovation and contributed to the advancement of wafer positioning technologies.
Conclusion
Hatice Sahin's contributions to wafer positioning technology exemplify her dedication to innovation in the semiconductor industry. Her patents and work at Applied Materials, Inc. highlight her role as a leading inventor in this critical field.