Haruka Kaneko

Title: Haruka Kaneko: Innovator in Temperature Control Technologies

Introduction

Haruka Kaneko is a prominent inventor based in Miyagi, Japan. She has made significant contributions to the field of temperature control technologies, holding 2 patents that showcase her innovative spirit and technical expertise.

Latest Patents

Her latest patents include a "Temperature Control Medium Processing Apparatus" and a "Temperature Control Medium Processing Method." The temperature control medium processing apparatus is designed to collect and refill a temperature control medium from a module. It features a tank for storage, an inlet path for introducing the medium, and an outlet path for expelling it. Additionally, a pump is integrated to facilitate the flow of the medium. The substrate processing apparatus and method involve a system that includes substrate-processing chambers and temperature control components. A chiller supplies two temperature-controlling mediums at different flow rates, allowing for precise control over the processing environment.

Career Highlights

Haruka Kaneko is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. Her work focuses on developing advanced technologies that enhance the efficiency and effectiveness of substrate processing.

Collaborations

She collaborates with talented coworkers, including Takehiko Arita and Hayato Sakai, contributing to a dynamic team environment that fosters innovation and creativity.

Conclusion

Haruka Kaneko's contributions to temperature control technologies reflect her dedication to advancing the field. Her patents demonstrate her ability to solve complex problems and improve processing methods in the semiconductor industry.