Haruhide Inoue

Title: Haruhide Inoue: Innovator in Ceramic Electrostatic Technology

Introduction

Haruhide Inoue is a notable inventor based in Himeji, Japan. He has made significant contributions to the field of electrostatic technology, particularly in the development of ceramic electrostatic chucks. His innovative work has implications for the semiconductor industry, where precision and reliability are paramount.

Latest Patents

Inoue holds a patent for a "Ceramic electrostatic chuck and method." This invention involves an electrostatic chuck designed to clamp working members, such as semiconductor wafers, securely. The chuck features at least one conductive electrode and an insulating layer that separates the electrode from the working member. The insulating layer is composed of a composition containing pyrolytic boron nitride (PBN) and a carbon dopant, ensuring its electrical resistivity is less than 10¹⁴ Ω-cm. By applying a voltage across the conductive electrode, an electrostatic field is generated, effectively clamping the working member to the chuck.

Career Highlights

Inoue's career is marked by his dedication to advancing ceramic materials and their applications in technology. His work at Advanced Ceramics Corporation has positioned him as a key player in the development of innovative solutions for the semiconductor manufacturing process.

Collaborations

Inoue has collaborated with notable colleagues, including Junich Honma and Kotaro Mino. These partnerships have fostered a creative environment that encourages the exchange of ideas and the development of cutting-edge technologies.

Conclusion

Haruhide Inoue's contributions to the field of ceramic electrostatic technology exemplify the importance of innovation in the semiconductor industry. His patent for the ceramic electrostatic chuck showcases his expertise and commitment to advancing technology.