Company Filing History:
Years Active: 1999
Title: Innovations by Harry Lee: A Pioneer in Temperature Regulation in CMP Processes
Introduction: Harry Lee, an inventor based in Los Altos, CA, has made significant contributions to the field of chemical mechanical polishing (CMP) through his innovative patent. His work focuses on improving temperature regulation during the CMP process, which is vital for the semiconductor manufacturing industry.
Latest Patents: Harry Lee holds a patent for a system that enhances temperature regulation in a CMP process. This invention facilitates heat transfer between a linear CMP belt and an adjacent heat transfer source, enabling a predetermined lateral temperature distribution across the belt. The innovative design incorporates temperature sensors that generate feedback signals to control the heat transfer sources effectively. This allows for precise stability and control of the polishing process, necessary for achieving high-quality semiconductor surfaces.
Career Highlights: Harry is associated with Aplex, Inc., where he has been able to apply his patent to improve the polishing processes used in semiconductor fabrication. His work is essential in ensuring that the polishing operations meet the stringent requirements of the industry, which is characterized by the need for exacting precision and reliability.
Collaborations: Throughout his career, Harry has collaborated with talented individuals such as Shu-Hsin Kao and Shou-sung Chang, further enhancing the development of his innovative technologies. Together, they have contributed to advancing the capabilities of CMP processes, driving forward solutions that deliver consistent results in semiconductor production.
Conclusion: Harry Lee stands out as a key innovator in the semiconductor manufacturing sector with his patent on temperature regulation in CMP processes. His contributions not only reflect his inventive spirit but also underscore the importance of collaborative efforts in driving technological advancements. With his work, he has significantly impacted the future of semiconductor manufacturing processes.