Location History:
- Boeblingen, DE (1979 - 1985)
- Boblingen, DE (1985)
- Ammerbuch, DE (1986)
Company Filing History:
Years Active: 1979-1986
Title: Profile of Inventor Harald Bohlen
Introduction
Harald Bohlen, a notable inventor hailing from Böblingen, Germany, has made significant contributions to the field of lithography. With a total of 14 patents, he has developed innovative methods that push the boundaries of technology and manufacturing processes.
Latest Patents
Bohlen's latest patents showcase his pioneering work in radiation-sensitive layers and error-corrected corpuscular beam lithography. One of his patents outlines a method of transferring a pattern into a radiation-sensitive layer. This innovative process involves projection of two partial patterns, which, when aligned, combine to create a desired final pattern. It is particularly relevant in applications that require the use of hole masks and complementary masks, allowing for intricate designs, especially for patterns that include annular elements.
His second recent patent focuses on an apparatus and method for testing transmission masks used in corpuscular lithography. This invention includes a method where an image from a mask is moved across a pinhole diaphragm using a tilted corpuscular beam. The system enables precise testing for geometrical errors and the detection of impurities, utilizing a matrix of submicron apertures for sensitive measurements.
Career Highlights
Harald Bohlen currently works at International Business Machines Corporation, commonly known as IBM. Over the years, he has accumulated a wealth of experience and expertise, becoming a recognized figure in the field of innovative lithographic technologies. His role at IBM has allowed him to be at the forefront of research and development, pushing the limits of what's possible in microfabrication and pattern transfer technologies.
Collaborations
Throughout his career, Bohlen has collaborated with esteemed colleagues such as Peter Nehmiz and Johann Greschner. These partnerships have been instrumental in advancing his projects and have fostered a creative environment conducive to innovation.
Conclusion
Harald Bohlen's contributions to the field of lithography are marked by his extensive patent portfolio and collaborative efforts. His innovative methods continue to shape advancements in technology, making him a significant figure in modern inventions. His work not only demonstrates the potential of engineering designs but also highlights the importance of collaboration in achieving groundbreaking results.