Hans-Gerd Busmann

Title: Innovations of Hans-Gerd Busmann in Nanocrystalline Diamond Films

Introduction

Hans-Gerd Busmann is a notable inventor based in Bremen, Germany. He has made significant contributions to the field of microelectromechanical systems (MEMS) through his innovative work with nanocrystalline diamond films. His research focuses on the development of advanced materials and fabrication techniques that enhance the performance of MEMS devices.

Latest Patents

Hans-Gerd Busmann holds a patent for the "Patterning of nanocrystalline diamond films for diamond microstructures useful in MEMS and other devices." This patent describes a method of fabricating MEMS structures from ultrananocrystalline diamond films with average grain sizes of less than about 10 nm and feature resolution of less than about one micron. The process involves contacting carbon dimer species with an oxide substrate to form a carbide layer, followed by the deposition of ultrananocrystalline diamond. The resulting microfabrication process allows for the creation of structures with predetermined shapes and high feature resolution.

Career Highlights

Busmann is affiliated with the University of Chicago, where he continues to advance research in the field of nanotechnology and MEMS. His work has garnered attention for its potential applications in various high-tech industries, including electronics and sensors.

Collaborations

Some of his notable coworkers include Dieter M Gruen and Eva-Maria Meyer, who have collaborated with him on various research projects related to nanocrystalline materials and their applications.

Conclusion

Hans-Gerd Busmann's innovative work in the field of nanocrystalline diamond films has paved the way for advancements in MEMS technology. His contributions are significant in enhancing the capabilities of microstructures used in various devices.