Hanh Tuong Ha

Title: Hanh Tuong Ha - Innovator in Plasma Processing Technology

Introduction

Hanh Tuong Ha is a notable inventor based in San Jose, California. She has made significant contributions to the field of plasma processing technology. Her innovative work has led to the development of a unique patent that addresses critical challenges in the industry.

Latest Patents

Hanh Tuong Ha holds a patent for a "Lower electrode assembly of plasma processing chamber." This invention comprises a metal base and upper and lower edge rings. The metal base consists of metal plates brazed together, forming a brazed line on the lower side surface of the base. An edge ring support surface extends horizontally inwardly from the lower side surface, with an upper side surface above it. The upper edge ring features a lower surface mounted on the edge ring support surface, while the lower edge ring surrounds the lower side surface of the base, creating a gap between the upper and lower edge rings. This gap has an aspect ratio sufficient to impede arcing at the location of the braze line. Hanh's patent is a testament to her innovative spirit and technical expertise.

Career Highlights

Hanh Tuong Ha is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. Her role involves developing advanced technologies that enhance plasma processing capabilities. With her extensive knowledge and experience, she has become a valuable asset to her team.

Collaborations

Hanh has collaborated with talented coworkers, including Jason Augustino and Quan Chau. These partnerships have fostered a creative environment that encourages innovation and problem-solving.

Conclusion

Hanh Tuong Ha's contributions to plasma processing technology exemplify her dedication to innovation. Her patent and work at Lam Research Corporation highlight her role as a leading inventor in her field.