This inventor holds 2 USPTO granted patents. Top assignee: Tel America, Inc.. Active years: 1996-1998.
Company Filing History:
Years Active: 1996-1998
Title: Han Westendorp: Innovator in Plasma Technology
Introduction
Han Westendorp is a notable inventor based in Rockport, MA (US). He has made significant contributions to the field of plasma technology, holding 2 patents that focus on improving systems that expose samples to reactive plasmas. His work is characterized by innovative methods and apparatus that enhance the efficiency of plasma ignition processes.
Latest Patents
One of Han Westendorp's latest patents is titled "Apparatus and method for igniting plasma in a process module." This invention provides apparatus and methods for improving systems that expose samples to reactive plasmas, particularly for igniting plasma within a process module. The systems involve an electrode pair and a radiofrequency generator connected to one electrode. Gas is injected between the electrodes, where it is ionized and transformed into plasma. The invention includes ignition means for ionizing gas, such as silane, between electrodes separated by a small gap of less than approximately one centimeter. Additionally, a radiofrequency energy generator operates at high frequencies, e.g., 60 MHz, to transform molecules into plasma. Several embodiments of ignition means are taught by the invention, including an electron source, an ultraviolet source, a second radiofrequency energy generator, and radioactive sources, among others. A process module constructed according to this invention, using high-frequency energy and small electrode separations, achieves a high rate of deposition and a high production yield.
Career Highlights
Han Westendorp is currently associated with Tel America, Inc., where he continues to innovate in the field of plasma technology. His work has been instrumental in advancing the understanding and application of plasma systems in various industries.
Collaborations
Han has collaborated with notable colleagues, including Hans Meiling and John W Vanderpot, contributing to a dynamic and innovative work environment.
Conclusion
Han Westendorp's contributions to plasma technology through his patents and collaborative efforts highlight his role as a significant inventor in this field. His innovative approaches continue to influence advancements in plasma systems and their applications.