Company Filing History:
Years Active: 2000
Title: Han-mil Kim: Innovator in Semiconductor Technology
Introduction
Han-mil Kim is a prominent inventor based in Kyungki-do, South Korea. He has made significant contributions to the field of semiconductor technology, particularly through his innovative patent work. His expertise and dedication to advancing technology have positioned him as a valuable asset in the industry.
Latest Patents
Han-mil Kim holds a patent for a trench isolation method of semiconductor devices. This method is designed to prevent the formation of a dent between a trench isolation region and an active region, as well as to avoid the generation of water spots during the cleaning process. The trench isolation method involves forming an undercut in a stress-relief oxide pad pattern located below a nitride layer pattern that defines an active region. A nitride liner, which serves as a stress-buffer layer, is then formed around the undercut, ensuring that it conforms to the shape of the undercut. This innovative approach allows for the effective removal of the nitride hard mask pattern without etching the stress-buffer layer below the upper surface of the substrate. Additionally, the anti-reflection layer, which is a primary source of water spots, is simultaneously removed during the formation of the undercut.
Career Highlights
Han-mil Kim is currently employed at Samsung Electronics Co., Ltd., where he continues to push the boundaries of semiconductor technology. His work has been instrumental in enhancing the efficiency and reliability of semiconductor devices.
Collaborations
Throughout his career, Han-mil Kim has collaborated with notable colleagues, including Jong-kook Song and Dong-ho Ahn. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Han-mil Kim's contributions to semiconductor technology through his innovative patent work exemplify his commitment to advancing the field. His work at Samsung Electronics Co., Ltd. and collaborations with esteemed colleagues further highlight his impact on the industry.