Company Filing History:
Years Active: 1999-2000
Title: Innovations of Inventor Hak-Lay Chuang
Introduction
Hak-Lay Chuang is a distinguished inventor based in Austin, Texas, known for his significant contributions to the field of semiconductor technology. With a total of three patents to his name, Chuang has been pivotal in advancing methods related to interconnect structures and semiconductor device fabrication. His work is vital to improving the efficiency and performance of electronic devices.
Latest Patents
Chuang's latest patents showcase his innovative approach to semiconductor manufacturing. One of his patents is titled "Method of forming an interconnect structure with a graded composition." This inventive process involves placing a semiconductor wafer in a specialized process chamber containing a titanium target with a titanium nitride layer. Utilizing argon-based plasma, he achieves the deposition of Argon Uniquely Sputtered Titanium Nitride (AUSTiN) layers, which feature a nitrogen concentration gradient. This method significantly enhances the interconnect structure's performance.
Another notable patent, "Process for fabricating a semiconductor device," details a sophisticated approach to forming vias in semiconductor devices. By using etch chemistry selective to a transition metal oxy-nitride film, Chuang's method effectively deposits graded titanium and nitrogen-rich layers that optimize the device's operational capabilities.
Career Highlights
Chuang's professional journey has been marked by his role at Motorola Corporation, where he has significantly impacted semiconductor technology development. His extensive knowledge and innovative mindset have led to advancements that align with the company's commitment to excellence in electronic solutions.
Collaborations
In his endeavors, Chuang has collaborated with esteemed colleagues such as Larry E. Frisa and Laura Pressley. These partnerships have fostered an environment of creativity and technical expertise, allowing them to push the boundaries of what is possible in semiconductor technology.
Conclusion
Hak-Lay Chuang's contributions as an inventor continue to resonate within the semiconductor industry. With his cutting-edge patents and collaborative spirit, Chuang exemplifies the role of innovation in shaping the future of electronic devices. His work not only enhances device performance but also underscores the importance of continued research and development in this rapidly evolving field.