This inventor holds 1 USPTO granted patent. Top assignee: Samsung Electronics Co., Ltd.. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Ha-Sung Kim: Inventor in Substrate Processing Technology.
Introduction
Ha-Sung Kim is an inventor based in Suwon-si, South Korea, and is associated with Samsung Electronics Ltd. His patent work concerns substrate processing and cleaning methods used in process tubes.
Latest Patents
Kim is credited with 1 patent: “Substrate Processing Apparatus, Cleaning Substrate Processing Apparatus Cleaning Method, and Substrate Processing Method Including the Same.” The disclosed cleaning method inserts a boat into a process tube, then removes deposited materials through two removal processes. The first process supplies a first gas, and the second supplies a second gas. One gas is chlorine-based, while the other is fluorine-based.
Career Highlights
Kim’s listed patent reflects work on cleaning processes for substrate-processing equipment. The method uses sequential gas treatments to remove different deposited materials from a process tube.
Collaborations
Kim’s listed coworkers include Woong Lee and Giduck Kweon. The patent information provided does not specify their individual contributions.
Conclusion
Ha-Sung Kim’s recorded invention focuses on a two-stage, chlorine- and fluorine-based cleaning method for substrate-processing equipment.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile