H Frederick Woods

Title: Innovator H Frederick Woods: Pioneering High-Pressure Wafer Processing

Introduction

H Frederick Woods is a notable inventor based in Kalispell, Montana, whose contributions to semiconductor technology are marked by four registered patents. With a focus on high-pressure methods for wafer processing, Woods has developed innovative techniques that enhance the efficiency and effectiveness of semiconductor manufacturing.

Latest Patents

Woods's latest patents involve advanced methods and apparatus for processing wafers under pressure. One such patent details a sophisticated system designed for high-pressure drying of semiconductor wafers. This innovative technique includes several steps: the insertion of a wafer into an open vessel, immersion in a liquid, and subsequent pressure-sealing of the vessel. The vessel is then pressurized with an inert gas, followed by controlled drainage of the liquid via a moveable drain. This method extracts water from just below the gas-liquid interface, allowing for a controlled and effective drying process. The use of high pressure elevates the boiling point of liquids, thus facilitating higher temperatures to optimize chemical reactivity. Additionally, megasonic waves are employed with the pressurized fluid to improve cleaning performance, while supercritical substances are introduced in a sealed vessel to further promote cleaning and treatment of the wafers.

Career Highlights

Woods works at Semitool, Inc., a company recognized for its innovative solutions in the semiconductor industry. His career is distinguished by a commitment to developing technologies that advance wafer processing methodologies. The applications of his patents highlight significant improvements in cleaning and drying processes essential for semiconductor manufacturing.

Collaborations

Throughout his career, H Frederick Woods has collaborated with talented colleagues, including Eric J. Bergman and Ian Sharp. These partnerships have likely sparked additional innovative ideas and improvements in the field, demonstrating the power of teamwork in technological advancement.

Conclusion

H Frederick Woods exemplifies the role of an inventor in driving innovations within the semiconductor industry. His patents not only reflect his technical expertise but also the continuation of progress in wafer processing methodologies. As technology evolves, the contributions of inventors like Woods remain critical to advancing the capabilities of semiconductor manufacturing.