Company Filing History:
Years Active: 2024-2025
Title: Gyeong Min Park: Innovator in Substrate Processing Technology
Introduction
Gyeong Min Park is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 6 patents. His innovative designs and solutions have advanced the capabilities of various processing apparatuses.
Latest Patents
Among his latest patents is a substrate processing apparatus that features a substrate support within a chamber. This apparatus includes a shutter with a valve body that opens and closes the chamber's opening, along with a baffle plate that has a vertically inclined portion. Additionally, a contact member made of a conductive elastic material is positioned on the substrate support's side surface, ensuring contact when the shutter is closed. Another notable patent involves a substrate support that comprises multiple rings and a lifter mechanism, designed to enhance the efficiency of substrate processing.
Career Highlights
Gyeong Min Park is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work has been instrumental in developing advanced technologies that improve substrate processing efficiency and reliability.
Collaborations
He has collaborated with notable colleagues such as Nobutaka Sasaki and Shin Matsuura, contributing to various innovative projects within the company.
Conclusion
Gyeong Min Park's contributions to substrate processing technology exemplify his dedication to innovation and excellence in his field. His patents reflect a commitment to advancing technology and improving manufacturing processes.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.