Santa Clara, CA, United States of America

Guangwei Sun


Average Co-Inventor Count = 3.1

ph-index = 2

Forward Citations = 22(Granted Patents)


Company Filing History:


Years Active: 2020-2022

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2 patents (USPTO):

Title: Innovations by Guangwei Sun

Introduction

Guangwei Sun is a notable inventor based in Santa Clara, CA. He has made significant contributions to the field of gas distribution technology, holding 2 patents that showcase his innovative approach to processing substrates.

Latest Patents

His latest patents include a gas distribution assembly mounting for fragile plates to prevent breakage. This invention provides apparatus and methods for processing substrates using a gas injector unit with a quartz plate. The gas injector unit comprises an injector body with a first opening extending through it, featuring a nut portion and a clamp portion. A nut is positioned within the nut portion, spaced from the injector body by a spring, while a clamp is positioned within the clamp portion. This design allows for effective connection with the injector body. Additionally, he has developed a gas flow guide design for uniform flow distribution and efficient purge. This invention includes a chamber with a gas flow inlet guide to uniformly deliver process gas and a gas flow outlet guide to effectively purge process gases, thereby reducing purge time.

Career Highlights

Guangwei Sun is currently employed at Applied Materials, Inc., where he continues to innovate in the field of gas distribution technology. His work has significantly impacted the efficiency and effectiveness of processing substrates.

Collaborations

He collaborates with talented coworkers, including Kevin Griffin and Chien-Teh Kao, who contribute to the innovative environment at Applied Materials, Inc.

Conclusion

Guangwei Sun's contributions to gas distribution technology through his patents reflect his dedication to innovation and excellence in his field. His work continues to influence advancements in substrate processing.

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