Company Filing History:
Years Active: 1998-2003
Title: Innovations of Gregory P Johnston
Introduction
Gregory P Johnston is a notable inventor based in Albuquerque, NM (US). He has made significant contributions to the field of semiconductor technology, holding a total of 8 patents. His work focuses on the development of novel methods for creating thin film nanoporous aerogels, which have important applications in various technological domains.
Latest Patents
One of Johnston's latest patents is titled "Low volatility solvent-based method for forming thin film nanoporous aerogels on semiconductor substrates." This invention has enabled a new, simple thin film nanoporous dielectric fabrication method. It utilizes glycerol, or another low volatility compound, as a solvent, allowing for the production of nanoporous dielectrics at room temperature and atmospheric pressure. This method eliminates the need for supercritical drying, freeze drying, or a surface modification step before drying. Although some permanent shrinkage may occur during aging and/or drying, this invention allows for controlled porosity thin film nanoporous aerogels to be deposited, gelled, aged, and dried without atmospheric controls.
Another significant patent by Johnston is "Aerogel thin film formation from multi-solvent systems." This invention pertains to precursors and deposition methods suited to aerogel thin film fabrication. It discloses an aerogel precursor sol containing an oligomerized metal alkoxide, a high vapor pressure solvent, and a low vapor pressure solvent. The method allows for the application of the precursor sol as a thin film to a semiconductor wafer, providing a stable, spinnable sol for setting film thickness and ensuring good planarity and gap fill for patterned wafers.
Career Highlights
Gregory P Johnston has had a distinguished career, working at Texas Instruments Corporation. His innovative approaches to semiconductor technology have positioned him as a key figure in the field. His patents reflect a commitment to advancing the capabilities of thin film materials and their applications.
Collaborations
Johnston has collaborated with notable colleagues, including Douglas M Smith and William C Ackerman. These partnerships have contributed to the successful development of his patented technologies.
Conclusion
Gregory P Johnston's contributions to the field of semiconductor technology through his innovative patents demonstrate his expertise and commitment to advancing material science. His work continues to influence the development of new technologies in the industry.
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