Gregory J Grula

Title: Gregory J Grula: Innovator in Semiconductor Technology

Introduction

Gregory J Grula is a notable inventor based in Charlton, MA (US), recognized for his contributions to semiconductor technology. He holds a total of 4 patents, showcasing his innovative approach to transistor fabrication and isolation techniques.

Latest Patents

One of his latest patents is a "Transistor fabrication process in which a contact metallization is." This invention introduces a new process for creating a transistor in an integrated circuit, which allows for two silicide formations that are independent of each other. The process results in a low-resistance silicide layer over the source/drain region surfaces of the transistor, while also creating a lower resistance silicide over the gate interconnects. In this embodiment, a near-planar isolation process is applied, ensuring that the gate interconnect surfaces are co-planar. A first silicide layer is formed over the source/drain regions, followed by the application of a dielectric gap-fill material. A planarization method, such as chemical mechanical polishing, is then used to remove the gap-fill material down to the top surface of the gate interconnect. Finally, a relatively thick silicide is formed over the top surface of the gate interconnect.

Another significant patent is the "Method of forming trench isolated regions with sidewall doping." This method involves forming a shallow isolation trench in a semiconductor substrate, which has nearly vertical walls. A doped silicon layer is selectively grown on a sidewall and a portion of the bottom of the trench. The dopant from the silicon layer is then driven into the substrate through methods such as annealing, and the trench is subsequently filled with a dielectric material.

Career Highlights

Throughout his career, Gregory has worked with prominent companies such as Digital Equipment Corporation and Compaq Computer Corporation, Inc. His experience in these organizations has contributed to his expertise in semiconductor technologies and innovations.

Collaborations

Gregory has collaborated with notable coworkers, including John P Scoopo and Frances P Alvarez. Their combined efforts have likely fostered advancements in the field of semiconductor technology.

Conclusion

Gregory J Grula's innovative work in semiconductor technology, particularly in transistor fabrication and isolation methods, has made a significant impact in the industry. His patents reflect a commitment to advancing technology and improving semiconductor processes.