Company Filing History:
Years Active: 1999
Title: Innovations by Greg Simon: Enhancing CMP Processes with Temperature Regulation
Introduction
Greg Simon, an inventor based in Redwood City, CA, holds a patent that exemplifies innovation in the field of chemical mechanical polishing (CMP). His work has contributed significantly to the efficiency and quality of polishing processes in various applications.
Latest Patents
Simon is credited with a patent focusing on temperature regulation in a CMP process. The invention involves a mechanism where heat is transferred between a linear CMP belt and an adjacent heat transfer source. This allows for a predetermined lateral temperature distribution across the belt, ensuring precise control during the polishing process. Temperature sensors play a crucial role by generating feedback signals to adjust the heat transfer sources. The system accommodates multiple selectively controllable heat transfer sources, which can function at temperatures above or below ambient levels. The mechanisms of heat transfer—including convection, conduction, and radiation—offer substantial flexibility in maintaining selective non-uniform temperature distributions, which enhances process stability and precision.
Career Highlights
Greg Simon's work at Aplex, Inc. stands out in the realm of CMP technology. His innovative approaches have led to improved methodologies that optimize polishing processes for semiconductor fabrication, ultimately contributing to advancements in electronics manufacturing. Throughout his career, Simon has demonstrated a commitment to enhancing technological capabilities through effective thermal management.
Collaborations
In his endeavors, Greg Simon has collaborated with notable coworkers, including Shu-Hsin Kao and Shou-sung Chang. These partnerships have played a vital role in developing and refining his patented technologies, showcasing the importance of teamwork in the innovation process.
Conclusion
Greg Simon's contributions to temperature regulation in CMP processes represent a significant advancement in manufacturing technology. His patent not only illustrates his inventive spirit but also highlights the collaborative nature of innovation within the industry. With his insights and inventions, Simon continues to influence the future of semiconductor manufacturing.