Greg Patrick Mulligan

Title: Innovations by Greg Patrick Mulligan

Introduction

Greg Patrick Mulligan is a notable inventor based in Milpitas, CA (US). He has made significant contributions to the field of semiconductor fabrication through his innovative patents. With a total of three patents to his name, Mulligan has demonstrated a commitment to advancing technology in fluid control systems.

Latest Patents

Mulligan's latest patents include a fluid flow control system comprising a manifold assembly. This system is essential for processing articles in semiconductor fabrication. It features a plurality of fluid supplies configured to supply process fluids, along with apparatuses for controlling flow. The design includes a vacuum manifold and an outlet manifold, which are fluidly coupled to mounting substrates. Additionally, his fluid control system improves the delivery of fluid mixtures by directly controlling the concentration of constituent components. This system utilizes a concentration sensor and pressure sensors to provide real-time process control, enhancing measurement accuracy and reducing system response time.

Career Highlights

Mulligan's career is marked by his role at Ichor Systems, Inc., where he has been instrumental in developing advanced fluid delivery systems. His work has significantly impacted the semiconductor industry, showcasing his expertise in fluid dynamics and process engineering.

Collaborations

Mulligan has collaborated with talented individuals such as Philip Ryan Barros and Chris Melcer. These collaborations have fostered innovation and contributed to the success of their projects.

Conclusion

Greg Patrick Mulligan's contributions to fluid control systems in semiconductor fabrication highlight his innovative spirit and technical expertise. His patents reflect a deep understanding of the complexities involved in fluid dynamics, making him a valuable asset in the field.