Company Filing History:
Years Active: 2003
Title: Inventor Greg Goldspring: Pioneering Advances in Gold Etching Technology
Introduction
Greg Goldspring, an inventive mind located in Alameda, California, has made significant contributions to the field of plasma processing. With a focus on enhancing the etching of gold metallization, his innovative methods are impacting the semiconductor manufacturing industry.
Latest Patents
Goldspring holds a patent for a method and apparatus for etching a gold metal layer using a titanium hardmask. This method involves introducing a substrate with a gold layer and an overlying titanium hardmask into a plasma processing chamber. The process begins with the etching of the hardmask using conventional techniques, followed by the formation of a plasma utilizing an oxidizing gas and an etching gas, ideally containing hydrochloric acid and possibly chlorine. This plasma is then employed to etch the gold layer through the titanium hardmask, demonstrating a novel approach to efficient metallization processes.
Career Highlights
Goldspring is affiliated with Lam Research Corporation, a leading company in the semiconductor equipment sector. His work is instrumental in advancing the processes used in manufacturing and enhancing the performance of semiconductor devices.
Collaborations
Throughout his career, Goldspring has collaborated with talented professionals including Gladys So-Wan Lo and David W. Mytton. Their combined expertise contributes to the dynamic environment at Lam Research Corporation, driving innovation and excellence.
Conclusion
Greg Goldspring's innovative contributions to gold etching methods underscore his importance in the field of semiconductor manufacturing. His patent highlights the potential for new techniques in plasma processing, showcasing the impact that dedicated inventors can have on technology and industry advancements.