Grant Peng

Title: Grant Peng: Innovator in Semiconductor Cleaning Technologies

Introduction

Grant Peng, an accomplished inventor located in Fremont, CA, has made significant contributions to the field of semiconductor processing. With a total of four patents to his name, he has been at the forefront of innovative technologies aimed at enhancing the cleanliness and efficiency of semiconductor manufacturing processes.

Latest Patents

Among his latest inventions, one notable patent outlines an "Acoustic Assisted Single Wafer Wet Clean for Semiconductor Wafer Process." This groundbreaking method involves applying a liquid medium to the surface of a substrate and utilizing transducers to generate acoustic energy. The applied acoustic energy prevents cavitation within the liquid medium while facilitating the dislodging of particle contaminants from the substrate surface. As a result, the contaminants are entrapped in the liquid medium and removed from the cleaning area.

Another of his significant patents focuses on "Methods for Particle Removal by Single-Phase and Two-Phase Media." This invention targets the cleaning of patterned substrates with fine features, ensuring they are effectively cleaned without incurring damage. By using specialized cleaning materials containing high molecular weight polymers, this method captures and traps contaminants, preventing their return to the substrate surface.

Career Highlights

Grant Peng has worked at notable companies in the semiconductor industry, including Lam Research Corporation and Lam Research Group. His experience in these organizations has equipped him with valuable insights and skills, which he has leveraged in his patent innovations.

Collaborations

Throughout his career, Grant has collaborated with talented coworkers, including Shih-Chung Kon and David S. L. Mui. These partnerships have played a vital role in advancing the technologies he has developed, fostering a culture of innovation and problem-solving within the semiconductor sector.

Conclusion

In conclusion, Grant Peng is a pioneering inventor whose work in semiconductor cleaning technologies has demonstrated a profound impact within the industry. His innovative patents not only address critical challenges in semiconductor manufacturing but also pave the way for more efficient and effective cleaning methods, underscoring his commitment to advancing technology in this vital field.