This inventor holds 4 USPTO granted patents and 3 published patent applications. Top assignee: Lam Research Corporation. Active years: 2025-2026.
Company Filing History:
Years Active: 2025-2026
Title: Gordon Peng: Innovator in Gas Distribution and RFID Technology
Introduction
Gordon Peng is a notable inventor based in San Jose, California. He has made significant contributions to the field of substrate processing systems through his innovative patents. With a total of two patents to his name, Peng continues to push the boundaries of technology in his industry.
Latest Patents
Gordon Peng's latest patents include a "Multizone Gas Distribution Plate for Trench Profile Optimization." This invention features a gas distribution device that consists of an upper plate with a first hole and multiple second holes, along with a lower plate that has a recessed region. This design creates a plenum volume that optimizes gas distribution for substrate processing. Another significant patent is the "Encapsulated RFID in Consumable Chamber Parts." This invention involves embedding a radio frequency tag within a pocket of a consumable part, allowing for effective tracking within a process chamber.
Career Highlights
Gordon Peng is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work focuses on enhancing the efficiency and effectiveness of substrate processing systems. His innovative approach has garnered attention and respect within the field.
Collaborations
Gordon collaborates with talented coworkers, including Yu Jiang and David Celli. Their combined expertise contributes to the advancement of technology at Lam Research Corporation.
Conclusion
Gordon Peng is a distinguished inventor whose work in gas distribution and RFID technology has made a significant impact in the semiconductor industry. His innovative patents reflect his commitment to advancing technology and improving processes.